1.

国際会議録
国際会議録
1. Noncontact testing of optical surfaces by multiple-wavelength light scattering measurement
Duparre,A. ; Gliech,S.
出版情報: 10th Meeting on Optical Engineering in Israel, 2-6 March 1997, Jerusalem, Israel.  Part 2  pp.566-573,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3110
2.

国際会議録
国際会議録
2. International round-robin experiment on optical total scattering at 633 nm according to ISO/DIS 13696
Kadkhoda,P. ; Amra,C. ; Bennett,J.M. ; Deumie,C. ; Duparre,A. ; Gliech,S. ; Jolie,C. ; Kessler,H. ; Lauth,H. ; Lindstroem,T. ; Muller,A. ; Reng,N. ; Ribbing,C.G. ; Ristau,D. ; Schuhmann,U. ; Tilsch,M.
出版情報: Optical fabrication and testing : 26-28 May 1999, Berlin, Germany.  pp.548-556,  1999.  Bellingham, WA.  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3739
3.

国際会議録
国際会議録
3. Advanced methods for surface and subsurface defect characterization of optical components
Steinert,J. ; Gliech,S. ; Wuttig,A. ; Duparre,A. ; Truckenbrodt,H.
出版情報: Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA.  pp.290-298,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4099
4.

国際会議録
国際会議録
4. DUV/VUV light scattering measurement of optical components for lithography applications
Gliech,S. ; Steinert,J. ; Flemming,M. ; Duparre,A.
出版情報: Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA.  pp.74-81,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4099
5.

国際会議録
国際会議録
5. Wide-scale surface characterization by combination of scanning force microscopy,white light interferometry,and light scattering
Gliech,S. ; Duparre,A. ; Recknagel,R.-J. ; Notni,G.
出版情報: Optical fabrication and testing : 26-28 May 1999, Berlin, Germany.  pp.355-362,  1999.  Bellingham, WA.  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3739
6.

国際会議録
国際会議録
6. Light scattering and atomic force microscopic investigations on magnetron sputtered oxide single layers and multilayers for micromechanical laser mirrors
Kupfer,H. ; Richter,F. ; Schlott,P. ; Duparre,A. ; Gliech,S.
出版情報: Advances in Optical Interference Coatings : 25-27 May 1999, Berlin, Germany.  pp.394-400,  1999.  Bellingham, WA.  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3738
7.

国際会議録
国際会議録
7. Quality assessment of supersmooth to rough surfaces by multiple-wavelength light scattering measurement
Duparre,A. ; Gliech,S.
出版情報: Scattering and surface roughness : 30-31 July 1997, San Diego, California.  pp.57-64,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3141
8.

国際会議録
国際会議録
8. Analysis of interface and volume inhomogeneities in a multilayer system by light scattering methods
Pichlmaier,S. ; Hehl,K. ; Schuhmann,U. ; Gliech,S. ; Duparre,A.
出版情報: Specification, Production, and Testing of Optical Components and Systems.  Part1  pp.287-296,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 2775
9.

国際会議録
国際会議録
9. Apparatus for measuring integrated light scattering of optical components over an extended range of wavelengths
Gliech,S. ; Duparre,A.
出版情報: Specification, Production, and Testing of Optical Components and Systems.  Part1  pp.297-304,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 2775