Tomaszewski, D. ; Lukasiak, L. ; Gibki, J. ; Domanski, K. ; Jakubowski, A. ; Zareba, A.
出版情報:
Proceedings of the Eleventh International Workshop on the Physics of Semiconductor Devices : (December 11-15, 2001). VOL-1 pp.725-728, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Czerwinski, A. ; Tomaszewski, D. ; Gibki, J. ; Bakowski, A. ; Klima, K. ; Katcki, J. ; Simoen, E. ; Claeys, C.
出版情報:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.218-227, 1997. Pennington, NJ. Electrochemical Society