Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications. pp.138-146, 1997. Pennington, NJ. Electrochemical Society
Wiemer, M. ; Hiller, K. ; Hahn, R. ; Kaufmann, C. ; Gessner, T.
出版情報:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.368-380, 1999. Pennington, N.J.. Electrochemical Society
Scheibner, D. ; Wibbeler, J. ; Mehner, J. ; Braemer, B. ; Gessner, T. ; Doetzel, W.
出版情報:
Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France. pp.325-332, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Beyer, R. ; Burghardt, H. ; Reich, R. ; Thomas, E. ; Grambole, D. ; Herrmann, F. ; Scholz, T. ; Albrecht, J. ; Zahn, D. R. T. ; Gessner, T.
出版情報:
Materials reliability in microelectronics VI : symposium held April 8-12, 1996, San Francisco, California, U.S.A.. pp.421-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Wiemer, M. ; Zimmermann, S. ; Zhao, Q.T. ; Trui, B. ; Kaufmann, C. ; Mantl, S. ; Dudek, V. ; Gessner, T.
出版情報:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.303-310, 2005. Pennington, NJ. Electrochemical Society
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.301-308, 2003. Pennington, NJ. Electrochemical Society
Kuechler, M. ; Griesbach, K. ; Bertz, A. ; Gessner, T. ; Faust, T. ; Dudek, R.
出版情報:
Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.. pp.33-38, 1999. Warrendale, Pa.. Materials Research Society
Proceedings of the Second International Symposium on Microstructures and Microfabricated Systems. pp.297-308, 1995. Pennington, NJ. Electrochemical Society
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