Chakravarthi, Srinivasan ; Gencer, Alp H. ; Dunham, Scott T. ; Downey, Daniel F.
出版情報:
Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.. pp.B4.8-, 2001. Warrendale, PA. Materials Research Society
Microstructure evolution during irradiation : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.35-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.27-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.105-, 1998. Warrendale, Pa.. MRS - Materials Research Society