Green, M.L. ; Gusev, E.P. ; Lu, H. ; Garfunkel, E. ; Gustafsson, T. ; Lennard, W.N.
出版情報:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.745-759, 1998. Pennington, NJ. Electrochemical Society
Osburn, C.M. ; Han, S.K. ; Kim, I. ; Campbell, S.A. ; Garfunkel, E. ; Gustafson, T. ; Hauser, J. ; King, T.-J. ; Liu, Q. ; Ranade, P. ; Kingon, A. ; Kwong, D.-L. ; Lee, S.J. ; Lee, C.H. ; Lee, J. ; Onishi, K. ; Kang, C.S. ; Choi, R. ; Cho, H. ; Nich, R. ; Lucovsky, G. ; Hong, J.G. ; Ma, T.P. ; Zhu, W. ; Luo, Z. ; Maria, J.P. ; Wicaksana, D. ; Misra, V. ; Lee, J.J. ; Suh, Y.S. ; Parksons, G. ; Niu, D. ; Stemmer, S.
出版情報:
ULSI Process Integration : proceedings of the International Symposium. pp.375-390, 2003. Pennington, N.J.. Electrochemical Society
Gusev, E. P. ; Lu, H. C. ; Gustafsson, T. ; Garfunkel, E.
出版情報:
Interface control of electrical, chemical, and mechanical properties : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.. pp.69-, 1994. Pittsburgh. MRS - Materials Research Society
Sayan, S. ; Bartynski, R.A. ; Robertson, J. ; Suehle, J.S. ; Vogel, E. ; Nguyen, N.V. ; Ehrstein, J. ; Kopanski, J.J. ; Suzer, S. ; Holl, M.B. ; Garfunkel, E.
出版情報:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.255-263, 2004. Pennington, NJ. Electrochemical Society
Gusev, E. ; Lu, H.C. ; Gustafsson, T. ; Garfunkel, E.
出版情報:
The physics and chemistry of SiO[2] and the Si-SiO[2] interface-3, 1996 : proceedings of the Third International Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface. pp.49-58, 1996. Pennington, NJ. Electrochemical Society