Clevenger, L. A. ; Arcot, B. ; Ziegler, W. ; Colgan, E. G. ; Hong, Q. Z. ; d'Heurle, F. M. ; Cabral, C., Jr. ; Gallo, T. A. ; Harper, J. M. E.
出版情報:
Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.133-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Better ceramics through chemistry IV : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.269-272, 1990. Pittsburgh, Pa.. Materials Research Society