Niedernostheide, F.-J. ; Schulze, H.-J. ; Kellner-Werdehausen, U. ; Frohnmeyer, A. ; Wachutka, G.
出版情報:
Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany. pp.112-120, 2001. Pennington, N.J.. Electrochemical Society