Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.27-33, 2003. Pennington, NJ. Electrochemical Society
Chow, Y.F. ; Foo, T.H. ; Shen, L. ; Pan, J.S. ; Du, A. Y. ; Xing, Z.X. ; Yuan, Y.J. ; Li, C.Y. ; Kumar, R. ; Foo, P.D.
出版情報:
Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.563-568, 2002. Warrendale. Materials Research Society