Vallier, L. ; Joubert, O. ; Burke, R. ; Ferrieu, F. ; Devine, R.A.B.
出版情報:
Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A.. pp.193-196, 1993. Pittsburgh, Pa.. Materials Research Society
Ferrieu, F. ; Stehle, J. L. ; Bernoux, F. ; Thomas, O.
出版情報:
Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA. pp.403-410, 1988. Pittsburgh, Pa.. Materials Research Society
Glowacki, F. ; Larre, A. ; Ferrieu, F. ; Campidelli, Y. ; Bensahel, D.
出版情報:
Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.. pp.69-, 1994. Pittsburgh, PA. MRS - Materials Research Society