1.

国際会議録
国際会議録
1. SYNCHROTRON X-RAY TOPOGRAPHIC STUDY OF THE BEHAVIOR OF DEFECTS IN HIGH CARBON-CONTENT Si WAFERS DURING RTP
Fanning, Thomas ; Dudley, Michael ; Wang, Franklin F. Y. ; Gordon-Smith, David
出版情報: Materials reliability issues in microelectronics : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.301-306,  1991.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 225
2.

国際会議録
国際会議録
2. SYNCHROTRON TOPOGRAPHIC STUDIES OF THE INFLUENCE OF RAPID THERMAL PROCESSING ON DEFECT STRUCTURES IN SINGLE CRYSTAL SILICON
Dudley, Michael ; Wang, Franklin F.Y. ; Fanning, Thomas ; Tolis, Georgios ; Wu, Jun ; Hodul, David T.
出版情報: Defects in materials : symposium held November 26-29, 1990, Boston, Massachusetts, U.S.A..  pp.511-516,  1991.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 209
3.

国際会議録
国際会議録
3. INFLUENCE OF SURFACE RELAXATION AND MULTI-DISCLOCATION STRAIN FIELD INTERACTIONS ON X-RAY TOPOGRAPHIC IMAGES OF DISCLOCATIONS IN SEMICONDUCTOR MATERIALS
Wu, Jun ; Fanning, Thomas ; Dudley, Michael ; Shastry, Vijay ; Anderson, Peter
出版情報: Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A..  pp.265-270,  1992.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 262
4.

国際会議録
国際会議録
4. SYNCHROTRON X-RAY TOPOGRAPHY AS A NON-DESTRUCTIVE MONITOR OF DAMAGE ACCOMPANYING IC PROCESSING
Dudley, Michael ; Wang, Franklyn F. Y. ; Fanning, Thomas ; Gordon-Smith, David
出版情報: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.61-66,  1991.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 224
5.

国際会議録
国際会議録
5. RAPID STRUCTURAL DEFECT MAPPING OF BULK II-VI SEMICONDUCTORS USING WHITE-BEAM SYNCHROTRON TOPOGRAPHY AND X-RAY ROCKING CURVE ANALYSIS.
Marzio, Don Di ; Casagrande, Louis G. ; Lee, Myung B. ; Fanning, Thomas ; Dudley, Michael
出版情報: Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A..  pp.215-222,  1992.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 262