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Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.379-390, 1994. Pennington, NJ. Electrochemical Society
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Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.468-489, 1998. Pennington, NJ. Electrochemical Society
Borionetti, G. ; Porrini, M. ; Geranzani, P. ; Orizio, R. ; Falster, R.
出版情報:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.104-110, 1994. Pennington, NJ. Electrochemical Society
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.3-17, 1997. Pennington, NJ. Electrochemical Society
Eichinger, P. ; Hage, J. ; Huber, D. ; Falster, R.
出版情報:
Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing. pp.240-251, 1993. Pennington, NJ. Electrochemical Society
Falster, R. ; Laczik, Z. ; Booker, G. R ; Bhatti, A. R. ; Tork, P.
出版情報:
Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.945-956, 1992. Pittsburgh, Pa.. Materials Research Society