D. Lopez ; V. A. Aksyuk ; G. P. Watson ; W. M. Mansfield ; R. Cirelli ; F. Klemens ; F. Pardo ; E. Ferry ; J. Miner ; T. W. Sorsch ; M. Peabody ; J. Bower ; C. S. Pai ; J. Gates
出版情報:
Smart sensors, actuators, and MEMS III : 2-4 May 2007, Maspalomas, Gran Canaria, Spain. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
H. Dyson ; F. Pardo ; R. Ryf ; V. Aksyuk ; R. Frahm
出版情報:
MEMS adaptive optics II : 22-24 January 2008, San Jose, California, USA. pp.68880T-1-68880T-6, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering