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出版情報:
Magnetic Materials, Processes, and Devices VI, Applications to Storage and Microelectromechanical Systems (MEMS) : proceedings of the International Symposium. pp.348-358, 2000. Pennington, N.J.. Electrochemical Society
Kataoka, I. ; Ito, K. ; Hoshi, N. ; Yonemitsu, T. ; Etoh, K. ; Yamada, I. ; Delaunay, Jean-Jacques
出版情報:
Low energy ion beam and plasma modification of materials : symposium held April 30-May 2, 1991, Anaheim, California, U.S.A.. pp.359-364, 1991. Pittsburgh, Pa.. Materials Research Society
Miyazaki, S. ; Shiba, K. ; Miyoshi, N. ; Etoh, K. ; Kohno, A. ; Hirose, M.
出版情報:
Microcrystalline and nanocrystalline semiconductors--1998 : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.. pp.45-, 1999. Warrendale, PA. MRS - Materials Research Society