Dornberger, E. ; Esfandyari, J. ; Vanhellemont, J. ; Graef, D. ; Lambert, U. ; Dupret, F. ; von Ammon, W.
出版情報:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.490-502, 1998. Pennington, NJ. Electrochemical Society
Dornberger, E. ; Esfandyari, J. ; Graef, D. ; Vanhellemont, J. ; Lambert, U. ; Dupret, F. ; von Ammon, W.
出版情報:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.40-49, 1997. Pennington, NJ. Electrochemical Society
Esfandyari, J. ; Senkader, S. ; Hobler, G. ; Poetzl, H. ; Murphy, B.
出版情報:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.896-907, 1994. Pennington, NJ. Electrochemical Society