1.

国際会議録
国際会議録
1. Effect of Organic Acids in Slurry on Copper CMP
Eom, Dae-Hong ; Kim, Hyung-Joon ; Song, Hyung-Soo ; Park, Jin-Goo
出版情報: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.201-211,  2000.  Pennington, N.J..  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 2000-26
2.

国際会議録
国際会議録
2. THE REACTION OF OZONE AND H2O2 IN AMMONIUM HYDROXIDE (NH4OH) SOLUTIONS AND THEIR REACTION WITH SILICON WAFERS
Eom, Dae-Hong ; Kim, Sang-Yong ; Lee, Kang-Kuk ; Kim, Ki-Sub ; Song, Hyung-Soo ; Park, Jin-Goo
出版情報: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.288-295,  1999.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 99-36