Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California. pp.384-394, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Micro- and nanotechnology for biomedical and environmental applications : 26-27 January 2000, San Jose, California, USA. pp.41-49, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering