Gates, S. ; Chen, S.T. ; Chen, X. ; Cohen, S. ; Edelstein, D. ; Fitzsimmons, J. ; Hedrick, J. ; Restaino, D. ; Ryan, J. ; Simonyi, E. ; Purushothaman, S.
出版情報:
Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium. pp.31-39, 2000. Pennington, N.J.. Electrochemical Society
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.39-, 1998. Warrendale, Pa.. MRS - Materials Research Society
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