Law, M. E. ; Jones, K. S. ; Earles, S. K. ; Lilak, A. D. ; Xu, J-W.
出版情報:
Microstructure evolution during irradiation : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.3-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.379-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Law, M. E. ; Jones, K. S. ; Earles, S. K. ; Lilak, A. D. ; Xu, J-W.
出版情報:
Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.45-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Robertson, L. S. ; Warnes, P. N. ; Jones, K. S. ; Earles, S. K. ; Law, M. E. ; Downey, D. F. ; Falk, S. ; Liu, J.
出版情報:
Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.. pp.B4.2-, 2001. Warrendale, PA. Materials Research Society
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