Jaraiz, Martin ; Pelaz, Lourdes ; Rubio, Emiliano ; Barbolla, Juan ; Gilmer, George H. ; Eaglesham, David J. ; Gossmann, Hans J. ; Poate, John M.
出版情報:
Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.43-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Charatan, Robert M. ; Gross, Mihal E. ; Eaglesham, David J.
出版情報:
Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.329-, 1994. Pittsburgh, PA. MRS - Materials Research Society
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