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出版情報:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS 3 : new materials, processes and equipment. pp.31-40, 2007. Pennington, NJ. Electrochemical Society
M.B. Gonzalez ; E. Simoen ; E. Rosseel ; P. Verheyen ; L. Souriau
出版情報:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS 4 : new materials, processes and equipment. pp.23-30, 2008. Pennington, N.J.. Electrochemical Society
J. Vanhellemont ; J. Lauwaert ; J. Chen ; H. Vrielinck ; J.M. Rafi ; H. Ohyama ; E. Simoen ; D. Yang
出版情報:
Materials and devices for end-of-roadmap and beyond CMOS scaling : symposium held April 5-9, 2010, San Francisco, California. pp.73-78, 2010. Warrendale, Pa.. Materials Research Society