Chakravarthi, Srinivasan ; Gencer, Alp H. ; Dunham, Scott T. ; Downey, Daniel F.
出版情報:
Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.. pp.B4.8-, 2001. Warrendale, PA. Materials Research Society
Dunham, Scott T. ; Agarwal, Anuradha M. ; Jeng, Nanseng
出版情報:
Impurities, defects, and diffusion in semiconductors : bulk and layered structures : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.543-548, 1990. Pittsburgh, Pa.. Materials Research Society
SiO[2] and its interfaces : symposium held November 30-December 5, 1987, Boston, Massachusetts, U.S.A.. pp.301-306, 1988. Pittsburgh, Pa.. Materials Research Society
Microstructure evolution during irradiation : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.35-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A.. pp.3-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.353-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.47-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.27-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.105-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.. pp.169-174, 2002. Warrendale, Pa.. Materials Research Society
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