Gencer, A. H. ; Chakravarthi, S. ; Clejan, I. ; Dunham, S. T.
出版情報:
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.359-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.135-, 1999. Warrendale, PA. MRS - Materials Research Society
GaN and related alloys : symposium held November 30-December 4, 1998, Boston, Massachusetts, U.S.A.. pp.G6.41.1-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Diebel, M. ; Chakravarthi, S. ; Dunham, S. T. ; Machala, C. F. ; Ekbote, S. ; Jain, A.
出版情報:
CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A.. pp.211-216, 2003. Warrendale, Pa.. Materials Research Society
Windl, W. ; Bunea, M. M. ; Stumpf, R. ; Dunham, S. T. ; Masquelier, M. P.
出版情報:
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.91-, 1999. Warrendale, PA. MRS - Materials Research Society
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