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Metastable materials formation by ion implantation : proceedings of the Materials Research Society annual meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.. pp.395-400, 1982. New York. North-Holland
Lerch, W. ; Paul, S. ; Downey, D. F. ; Arevalo, E. A.
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Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.43-50, 2003. Pennington, NJ. Electrochemical Society
Robertson, L.S. ; Brindos, R. ; Jones, K. S. ; Law, Mark E. ; Downey, D. F. ; Falk, S. ; Liu, J.
出版情報:
Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.. pp.B5.8-, 2001. Warrendale, PA. Materials Research Society
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出版情報:
Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.237-, 1998. Pittsburgh, PA. MRS - Materials Research Society
Lavine, J. P. ; Zheng, L. ; Whalen, P. M. ; Downey, D. F.
出版情報:
Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.. pp.51-, 1996. Pittsburgh. MRS - Materials Research Society
Liu, J. ; Jones, K. S. ; Downey, D. F. ; Mehta, S.
出版情報:
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.9-, 1999. Warrendale, PA. MRS - Materials Research Society
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出版情報:
Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.. pp.B4.2-, 2001. Warrendale, PA. Materials Research Society
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