THE ROLE OF OXYGEN IN ZONE-MELTING RECRYSTALLTZATION OF SILICON-ON-INSULATORS FILMS
- 著者名:
- 掲載資料名:
- Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 23
- 発行年:
- 1984
- 開始ページ:
- 477
- 終了ページ:
- 490
- 総ページ数:
- 14
- 出版情報:
- New York: North-Holland
- ISSN:
- 02729172
- ISBN:
- 9780444009036 [0444009035]
- 言語:
- 英語
- 請求記号:
- M23500/23
- 資料種別:
- 国際会議録
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11
国際会議録
FORMATION OF SILICON ON INSULATOR (SOI) WITH SEPARATION BY PLASMA IMPLANTATION OF OXYGEN (SPIMOX)
MRS - Materials Research Society |
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