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Electrochemical processing in ULSI fabrication and semiconductor/metal deposition II : proceedings of the international symposium. pp.160-167, 1999. Pennington, N.J.. Electrochemical Society
Lee, K.-B. ; Kwak, N.-J. ; Kim, S.-D. ; Kim, C.-T. ; Fu, J. ; Nahm, M.K. ; Diaz, R. ; Lai, C.S. ; Xu, Z. ; Han, B.B. ; Park, J.-G. ; Jang, W.
出版情報:
Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing. pp.333-338, 1997. Pennington, NJ. Electrochemical Society
Gorostiza, P. ; Servat, J. ; Diaz, R. ; Sanz, F. ; Morante, J. R.
出版情報:
Electrochemical synthesis and modification of materials : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.275-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Merino, J.M. ; Diaz, R. ; Leon, M. ; Rueda, F. ; Alonso, A.A. ; Larue, J-C.
出版情報:
Proceedings of the European Space Power Conference, Poitiers, France, 4-8 September 1995. pp.487-494, 1995. Noordwijk, Netherlands. ESA Publications Division