Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A.. pp.47-52, 1992. Pittsburgh, Pa.. Materials Research Society
Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A.. pp.225-234, 1983. New York. North-Holland
Deutsch, T. F. ; Silversmith, D. J. ; Mountain, R. W.
出版情報:
Laser-controlled chemical processing of surfaces : symposium held November 1983 in Boston, Massachusetts, U.S.A.. pp.67-72, 1984. New York. North-Holland
Deutsch, T. F. ; Silversmith, D. J. ; Mountain, R. W.
出版情報:
Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A.. pp.129-134, 1983. New York. North-Holland
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