Degraeve, R. ; Kaczer, B. ; Roussel, Ph. ; Groeseneken, G.
出版情報:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.475-488, 2002. Pennington, NJ. Electrochemical Society
Groeseneken, G. ; Degraeve, R. ; De Blauwe, J. ; Roussel, P. ; Depas, M. ; Maes, H.
出版情報:
Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.3-19, 1997. Pennington, New Jersey. Electrochemical Society
Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium. pp.173-198, 2003. Pennington, N.J.. Electrochemical Society
Nigam, T. ; Degraeve, R. ; Groeseneken, G. ; Heyns, M. ; Maes, H. E.
出版情報:
Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.337-, 2000. Warrendale, PA. MRS-Materials Research Society
Groeseneken, G. ; Degraeve, R. ; Kaczer, B. ; Maes, H. E.
出版情報:
Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.295-, 2000. Warrendale, PA. MRS-Materials Research Society
Pantisano, L. ; Afanas'ev, V. ; Ragnarsson, L-A. ; Houssa, M. ; Degraeve, R. ; Groeseneken, G. ; Schram, T. ; DeGendt, S. ; Heyns, M.
出版情報:
Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France. pp.144-158, 2005. Pennington, N.J.. Electrochemical Society
Kaczer, B ; Degraeve, R. ; Arkhipov, V. ; Groeseneken, G.
出版情報:
Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium. pp.307-326, 2005. Pennington, N.J.. Electrochemical Society
De Jaeger, M. Meuris B. ; Kubicek, S. ; Verheyena, P. ; Van Steenbergen, J. ; Lujan, G. ; Kunnen, E. ; Sleeckx, E. ; Teerlinck, I. ; Van Elshocht, S. ; Delabie, A. ; Lindsay, R. ; Satta, A. ; Schram, T. ; Chiarella, T. ; Degraeve, R. ; Richard, O.
出版情報:
SiGe: materials, processing, and devices : proceedings of the First international symposium. pp.693-700, 2004. Pennington, N.J.. Electrochemical Society
Degraeve, R. ; Kaczer, B. ; Roussel, Ph. ; Groeseneken, G.
出版情報:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.475-488, 2002. Pennington, NJ. Electrochemical Society