Boher, P. ; Defranoux, C. ; Piel, J. P. ; Stehle, J. -L. P.
出版情報:
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.126-137, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Boher, P. ; Stehle, J.L. ; Defranoux, C. ; Bourtault, S. ; Piel, J.P. ; Evrard, P.
出版情報:
Rapid thermal and other short-time processing technologies II : proceedings of the international symposium. pp.67-78, 2001. Pennington, NJ. Electrochemical Society
Boher, P. ; Defranoux, C. ; Bourtauld, S. ; Piel, J.P. ; Bender, H.
出版情報:
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.305-315, 2003. Pennington, NJ. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Bellandi, E. ; Crivelli, B. ; Elbaz, A. ; Alessandri, M. ; Boher, P. ; Defranoux, C.
出版情報:
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.316-321, 2003. Pennington, NJ. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Bender, H. ; Conard, T. ; Richard, O. ; Brijs, B. ; Petry, J. ; Vandervorst, W. ; Defranoux, C. ; Boher, P. ; Rochat, N. ; Wyon, C. ; Mack, P. ; Wolstenholme, J. ; Vitchev, R. ; Houssiau, L. ; Pireaux, J-J. ; Bergmaier, A. ; Dollinger, G.
出版情報:
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.223-232, 2003. Pennington, NJ. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Bellandi, E. ; Crivelli, B. ; Elbaz, A. ; Alessandri, M. ; Boher, P. ; Defranoux, C.
出版情報:
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.316-321, 2003. Pennington, NJ. Electrochemical Society
Boher, P. ; Defranoux, C. ; Bourtauld, S. ; Piel, J.P. ; Bender, H.
出版情報:
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.305-315, 2003. Pennington, NJ. Electrochemical Society
Sun, L. ; Defranoux, C. ; Stehle, J. L. ; Boher, P. ; Evrard, P. ; Bellandi, E. ; Bender, H.
出版情報:
Fundamentals of novel oxide/semiconductor interfaces : symposium held December 1-4, 2003, Boston, Massachusetts, U.S.A.. pp.95-102, 2004. Warrendale, Pa.. Materials Research Society
Noguchi, T. ; Kerrien, G. ; Sarnet, T . ; Debarre, D. ; Boulmer, J. ; Zahorski, D. ; Hernandez, M. ; Defranoux, C. ; Laviron, C. ; Semeria, M.-N.
出版情報:
Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.. pp.33-38, 2002. Warrendale, Pa.. Materials Research Society
Bender, H. ; Brijs, B. ; Peby, J. ; Vandervorst, W. ; Defranoux, C. ; Boher, P. ; Rochat, N. ; Wyon, C. ; Mack, P. ; Woistenholme, I. ; Vitchev, R. ; Houssiau, L. ; Pireaux, J.-J. ; Bergmaier, A. ; Dollinger, G. ; Conard, T. ; Richard, O.
出版情報:
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.223-232, 2003. Pennington, NJ. Electrochemical Society