1.

国際会議録
国際会議録
1. *LOW TEMPERATURE SYNTHESIS OF SILICON OXIDE AND OXYNITRIDE FILMS BY REACTIVE LASER ABLATION
Fogarassy, E. ; Fuchs, C. ; Slaoui, A. ; De Unamuno, S. ; Stoquert, J.-P. ; Marine, W. ; Lang, B.
出版情報: Laser ablation in materials processing : fundamentals and applications : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A..  pp.319-330,  1993.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 285
2.

国際会議録
国際会議録
2. PHOSPHORUS AND BORON DOPING OF SILICON THIN FILMS USING ArF EXCIMER LASER
Slaoui, A. ; Pattyn, H. ; Fogarassy, E. ; De Unamuno, S. ; Stuck, R.
出版情報: Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A..  pp.389-396,  1992.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 236