1.

国際会議録
国際会議録
1. Scaling self-aligned contacts for 0.25ｦﾌ m and below
Perera,A. ; Pfiester,J.R. ; Lii,T. ; Feng,C. ; Bhat,M. ; Dao,T. ; Molloy,J. ; Blackwell,M. ; J. Cecil,
出版情報: Microelectronic Device Technology : 1-2 October 1997, Austin, Texas.  pp.171-175,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3212
2.

国際会議録
国際会議録
2. In-line testing of antenna-type test structures for separation of sources of process-induced damage
Brozek,T. ; Roberts,D. ; Dao,T.
出版情報: In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing.  pp.101-108,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3215