New materials approaches to tribology : theory and applications ; Symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.319-324, 1989. Pittsburgh, Pa.. Materials Research Society
Zhou, C. ; Shan, L. ; Hight, J.R. ; Ng, S.H. ; Paszkowski, A.J. ; Tichy, J. ; Danyluk, S.
出版情報:
Chemical mechanical polishing 2000 -- fundamentals and materials issues : symposium held April 26-27, 2000, San Francisco, California, U.S.A.. pp.E7.1-, 2001. Warrendale, PA. Materials Research Society
Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.187-196, 2000. Warrendale, PA. Materials Research Society
Zhou, Chunhong ; Shan, Lei ; Ng, S.H. ; Hight, Robert ; Paszkowski, Andrew J. ; Danyluk, S.
出版情報:
Chemical-mechanical polishing 2001 -- advances and future challenges : symposium held April 18-20, 2001, San Francisco, California, U.S.A.. 2001. Warrendale, PA. Materials Research Society
国際会議録
テクニカルペーパー
