1.

国際会議録
国際会議録
1. Advanced process control with design-based metrology
H. Yang ; J. Kim ; J. Hong ; D. Yim ; T. Hasebe ; M. Yamamoto
出版情報: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 6518
2.

国際会議録
国際会議録
2. Characteristics analysis of polarization module on optical proximity effect
C. Park ; J. Hong ; K. Yang ; T. Theeuwes ; F. Gautier ; Y. Min ; A. Chen ; H. Yang ; D. Yim ; J. Kim
出版情報: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 6520
3.

国際会議録
国際会議録
3. Application of full-chip optical proximity correction for sub-60-nm memory device in polarized illumination
H. Yune ; Y. Ahn ; D. Lee ; J. Moon ; B. Nam ; D. Yim
出版情報: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 6520
4.

国際会議録
国際会議録
4. Wide applications of design based metrology with tool integration
H. Yang ; J. Kim ; A. Jung ; T. Lee ; D. Yim
出版情報: Metrology, inspection, and process control for microlithography XXII.  2  pp.692239-1-692239-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 6922
5.

国際会議録
国際会議録
5. DFM flow by using combination between design based metrology system and model based verification at sub-50nm memory device
C. Kim ; J. Kim ; J. Choi ; H. Yang ; D. Yim
出版情報: Design for manufacturability through design-process integration : 28 February-2 March 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 6521
6.

国際会議録
国際会議録
6. OPC and design verification for DFM using die-to-database inspection
J. Kim ; H. Yang ; J. Song ; D. Yim ; T. Hasebe ; M. Yamamoto
出版情報: Design for manufacturability through design-process integration : 28 February-2 March 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 6521
7.

国際会議録
国際会議録
7. Highly accurate model-based verification using SEM image calibration method
B. Cho ; D. Park ; D. Chang ; J. Choi ; C. Kim ; D. Yim ; J. Kim
出版情報: Design for manufacturability through design-process integration : 28 February-2 March 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 6521