J. Choi ; S. H. Lee ; D. Nam ; B. G. Kim ; S. -G. Woo
出版情報:
Photomask and next-generation lithography mask technology XV. 2 pp.70281X-1-70281X-13, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
H. Singh ; A. Mustapha ; S. Kamthan ; A. M. Dixit ; D. Nam
出版情報:
Unmanned/unattended sensors and sensor networks V : 16-18 September 2008, Cardiff, Wales, United Kingdom. pp.711213-1-711213-10, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering