1.

国際会議録
国際会議録
1. Revisiting mask contact hole measurements
M. Higuchi ; E. Gallagher ; D. Ceperley ; T. Brunner ; R. Bowley ; A. McGuire
出版情報: EMLC 2007 : 23rd european mask and lithography conference : 22-25 January 2007, Grenoble, France.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 6533
2.

国際会議録
国際会議録
2. Collaborative platform, tool-kit, and physical models for DfM
A. Neureuther ; W. Poppe ; J. Holwill ; E. Chin ; L. Wang ; J. Yang ; M. Miller ; D. Ceperley ; C. Clifford ; K. Kikuchi ; J. Choi ; D. Dornfeld ; P. Friedberg ; C. Spanos ; J. Hoang ; J. Chang ; J. Hsu ; D. Graves ; A. C. F. Wu ; M. Lieberman
出版情報: Design for manufacturability through design-process integration : 28 February-2 March 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 6521