Borionetti, G. ; Falster, R. ; Bertolini, S. ; Cornara, M. ; Olmo, M. ; Chalmers, G. ; Childs, R. ; Marcuccilli, G.
出版情報:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.196-203, 1997. Pennington, NJ. Electrochemical Society
Falster, R. ; Gambaro, D. ; Olmo, M. ; Cornara, M. ; Korb, H.
出版情報:
Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A.. pp.27-, 1998. Warrendale, Pa. MRS - Materials Research Society