Collart, E. J. H. ; Gravesteijn, D. J. ; Lathouwers, E. G. C. ; Kersten, W. J.
出版情報:
Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A.. pp.115-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Cowern, N. E. B. ; Collart, E. J. H. ; Politiek, J. ; Bancken, P. H. L. ; Berkum, J. G. M. van ; Larsen, K. Kyllesbech ; Stolk, P. A. ; Huizing, H. G. A. ; Pichler, P. ; Burenkov, A. ; Gravesteijn, D. J.
出版情報:
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.265-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Collart, E. J. H. ; Weemers, K. ; Gravesteijn, D. J. ; Berkum, J. G. M. van ; Cowern, N. E. B.
出版情報:
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.53-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Materials reliability in microelectronics VII : symposium held April 8-12, 1997, San Francisco, California, U.S.A.. pp.343-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Collart, E. J. H. ; Cock, G. de ; Murrell, A. J. ; Foad, M. A.
出版情報:
Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.227-, 1998. Pittsburgh, PA. MRS - Materials Research Society
Foad, M. A. ; Murrell, A. J. ; Collart, E. J. H. ; Cock, G. de ; Jennings, D. ; Current, M. I.
出版情報:
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.55-, 1999. Warrendale, PA. MRS - Materials Research Society