Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A.. pp.321-326, 1984. New York. North-Holland
Tobben, D. ; Weigand, P. ; Shapiro, M. J. ; Cohen, S. A.
出版情報:
Low-dielectric constant materials II : symposium held December 2-3, 1996, Boston, Massachusetts, U.S.A.. pp.195-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA. pp.85-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Cohen, S. A. ; Liu, J. ; Gignac, L. ; Ivers, T. ; Armbrust, D. ; Rodbell, K. P. ; Gates, S. M.
出版情報:
Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.551-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Grill, A. ; Patel, V. ; Saenger, K. L. ; Jahnes, C. ; Cohen, S. A. ; Schrott, A. G. ; Edelstein, D. C. ; Paraszczak, J. R.
出版情報:
Low-dielectric constant materials II : symposium held December 2-3, 1996, Boston, Massachusetts, U.S.A.. pp.155-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Armbrust, D. ; Cohen, S. A. ; Gates, S. M. ; Gignac, L. ; Ivers, T. ; Liu, J. ; Rodbell, K. P.
出版情報:
Low-dielectric constant materials V : symposium held April 5-8, 1999, San Francisco, California, U.S.A.. pp.189-196, 1999. Warrendale, Pa.. Materials Research Society
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