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Investigation of stress in aluminum thin film for MEMS applications

著者名:
掲載資料名:
Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4593
発行年:
2001
開始ページ:
263
終了ページ:
273
総ページ数:
11
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443236 [0819443239]
言語:
英語
請求記号:
P63600/4593
資料種別:
国際会議録

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