Chow, C.F. ; Gao, Y. ; Wong, S.P. ; Ke, N. ; Li, Q. ; Cheung, W.Y. ; Shao, G. ; Lourenco, M.A. ; Homewood, K.P.
出版情報:
Amorphous and nanocrystalline silicon science and technology - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.. pp.507-512, 2005. Warrendale, Pa.. Materials Research Society
Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia. pp.19-25, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
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