Lim, H. M. ; Ji, H. B. ; Lee, Y. S. ; Kim, S. J. ; Lee, H. S. ; Cho, D. H.
出版情報:
Functionally graded materials VIII : proceedings of the 8th International Symposium on Multifunctional and Functionally Graded Materials (FGM2004) : held in Leuven, Belgium, 11-14 July 2004. pp.593-598, 2005. Switzerland. Trans Tech Publications
Kang, H. C. ; Lim, J. T. ; Choi, J. S. ; Lee, T. Y. ; Lee, B. H. ; Chin, S. B. ; Cho, D. H.
出版情報:
Metrology, Inspection, and Process Control for Microlithography XIX. pp.59-66, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
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