1.

国際会議録
国際会議録
1. Applied electrostatic parallelogram actuators for microwave switches by standard CMOS process
Yen,K. ; Chang,C. ; Chang,P. ; Chiou,J. ; Chen,J. ; Lin,H.
出版情報: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part2  pp.1022-1029,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3680
2.

国際会議録
国際会議録
2. Capacitive micropressure sensors with underneath readout circuit using a standard CMOS process
Chang,S. ; Dai,C. ; Chiou,J. ; Chang,P.
出版情報: Smart structures and materials 2001 : smart electronics and MEMS : 5-7 March, 2001, Newport Beach, USA.  pp.336-344,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4334