1.

国際会議録
国際会議録
1. 12 Performance enhancements for 50-nm PMOS by angled pre-amorphization implants and fluorine implants
Chidambaram, P.R. ; Ekbote, S. ; Chakravarthi, S. ; Chatterjee, A. ; Machala, C.F. ; Johnson, S.F.
出版情報: Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium.  pp.93-98,  2003.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 2003-14
2.

国際会議録
国際会議録
2. 53 Optimizing Channel Strain and Dislocations in PMOS Transistors with Local Epitaxial SiGe
Chidambaram, P.R. ; Chakravarthi, S. ; Machala, C. (Invited Paper)
出版情報: Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium.  pp.437-445,  2005.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 2005-05
3.

国際会議録
国際会議録
3. Modeling Of Diffusion And Activation Of Low Energy Arsenic Implants In Silicon
Chakravarthi, Srinivasan ; Chidambaram, P.R. ; Machala, Charles ; Jain, Amitabh ; Zhang, Xin
出版情報: Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A..  pp.129-134,  2002.  Warrendale, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 717