1.

国際会議録
国際会議録
1. Pushing releability limits in SiO2: an extension to gate oxide scaling
Roy,P.K. ; Chen,Y. ; Chetlur,S.
出版情報: Photonics 2000 : International Conference on Fiber Optics and Photonics : 18-20 December 2000, Calcutta, India : proceedings.  pp.161-171,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4417
2.

国際会議録
国際会議録
2. Manufacturing multilevel metal CMOS with deuterium anneals for improved hot-carrier reliablility
Kizilyalli,I.C. ; Abein,G. ; Chen,Z. ; Weber,G.R. ; Register,F. ; Harris,E. ; Chetlur,S. ; Higashi,G.S. ; Schofieled,M. ; Sen,S. ; Kotzias,B. ; Roy,P.K. ; Lyding,J.W. ; Hess,K.
出版情報: Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California.  pp.141-146,  1998.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3506
3.

国際会議録
国際会議録
3. Effects of high-density plasma processing on MOSFET matching,noise,and hot carrier reliability
Sen,S. ; Harris,E.B. ; Gregor,R.W. ; Martin,S. ; Abdelgadir,M.A. ; Barba,R.N. ; Chetlur,S. ; Steiner,K.
出版情報: Microelectronic Device Technology III.  pp.112-120,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3881