1.

国際会議録
国際会議録
1. Performance analysis and development of high-speed p-i-n infrared sensors prepared on crystalline silicon substrates
Chen,C.-Y. ; Ho,J.-J. ; Fang,Y.-K. ; Chen,S.-F.
出版情報: Optical engineering for sensing and nanotechnology (ICOSN 2001) : 6-8 June 2001, Yokohama, Japan.  pp.305-310,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4416
2.

国際会議録
国際会議録
2. Metal etch process defects
Lu,T.-Y. ; Hwang,Y.-K. ; Lai,C.-H. ; Chen,S.-F. ; Chen,C.-H.
出版情報: Process and equipment control in microelectronic manufacturing : 19-20 May 1999, Edinburgh, Scotland.  pp.173-179,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3742
3.

国際会議録
国際会議録
3. Generation mechanism and reduction methods of post-passivation-etch silklike polymers
Young,C.-D. ; Chen,S.-F. ; Chen,C.-H.
出版情報: Process and equipment control in microelectronic manufacturing : 19-20 May 1999, Edinburgh, Scotland.  pp.180-185,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3742
4.

国際会議録
国際会議録
4. SOG etch-back process induced surface roughness
Chu,P.-T. ; Chen,S.-F. ; Wu,J.-S. ; Hung,C.-C. ; Lin,T.-H. ; Chao,Y.-C.
出版情報: Microelectronic Device and Multilevel Interconnection Technology II.  pp.285-292,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 2875