Ma, Y. ; Yasuda, T. ; Chen, Y.L. ; Lucovsky, G. ; Maher, D.M.
出版情報:
Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A.. pp.147-152, 1993. Pittsburgh, Pa.. Materials Research Society
Evolution of surface and thin film microstructure : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.561-564, 1993. Pittsburgh, Pa.. Materials Research Society
Chen, Y.L. ; Bentley, J. ; Wang, C. ; Lucovsky, G. ; Maher, D.M.
出版情報:
Amorphous silicon technology, 1993 : Symposium held April 13-16, San Francisco, California, U.S.A.. pp.711-716, 1993. Pittsburgh, Pa.. Materials Research Society
Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.. pp.213-218, 1992. Pittsburgh, Pa.. Materials Research Society
Materials and devices for optical and wireless communications : APOC 2002 : Asia-Pacific Optical and Wireless Communications : 15-18 October, 2002, Shanghai, China. pp.414-422, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.329-338, 1994. Pennington, NJ. Electrochemical Society
Proceedings of IMAC-XX : a Conference on Structural Dynamics, February 4-7, 2002, The Westin Los Angeles Airport, Los Angeles, California. Volume I pp.867-872, 2002. Bethel, CT. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
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