Chen, Y.-T. ; Poon, P. ; Petti, C. ; Kamat, V. ; Sezginer. A. ; Huang, H.-T.
出版情報:
Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA. pp.61561E-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA. pp.1485-1492, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Photomask and Next-Generation Lithography Mask Technology XI. pp.595-602, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Chen, Y.-T. ; Lee, M. T. ; Chen, C. P. ; Huang, Y. Y. ; Wu, T. ; Ho, B. C.
出版情報:
Photomask and Next-Generation Lithography Mask Technology XII. pp.714-721, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering