Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.. pp.51-62, 1999. Warrendale, Pa.. Materials Research Society
Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.. pp.85-91, 1999. Warrendale, Pa.. Materials Research Society
Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.. pp.21-26, 1999. Warrendale, Pa.. Materials Research Society