Hartman, J. W. ; Atwater, H. A. ; Hashim, Imran ; Chin, Barry ; Chen, Fusen
出版情報:
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.303-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.65-, 1998. Warrendale, Pa.. MRS - Materials Research Society
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