Chapon, J.-D. ; Chaton, C. ; Gouraud, P. ; Broekaart, M. ; Warrick, S. ; Guilmeau, I. ; Trauiller, Y. ; Belledent, J.
出版情報:
Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA. pp.95-101, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Morin, P. ; Chaton, C. ; Reddy, C. ; Ortolland, C. ; Basso, M.T. ; Arnaud, F. ; Barla, K.
出版情報:
Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium. pp.253-266, 2005. Pennington, N.J.. Electrochemical Society
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