de Caunes, J. ; Van-Herk, J. ; Warrick, S. ; Le Gratiet, B. ; Mikolajczak, M. ; Chapon, J.-D. ; Monget, C. ; Gemmink, J.-W.
出版情報:
Data analysis and modeling for process control III : 23 February, 2006, San Jose, California, USA. pp.615507-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Chapon, J.-D. ; Chaton, C. ; Gouraud, P. ; Broekaart, M. ; Warrick, S. ; Guilmeau, I. ; Trauiller, Y. ; Belledent, J.
出版情報:
Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA. pp.95-101, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Belledent, J. ; Word, J. ; Trouiller, Y. ; Couderc, C. ; Miramond, C. ; Toublan, O. ; Chapon, J.-D. ; Baron, S. ; Borjon, A. ; Foussadier, F. ; Gardin, C. ; Lucas, K. ; Patterson, K. ; Rody, Y. ; Sundermann, F.
出版情報:
Photomask and Next-Generation Lithography Mask Technology XII. pp.202-210, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering